Lithographic apparatus and device manufacturing method

A position control system configured to control a location on a movable object, the system comprising:

• a position measurement system configured to determine a position of a sensor or sensor target on the movable object;
• a controller configured to provide a control signal based on a desired position of the location on the movable object and the determined position;
• one or more actuators configured to act on the movable object, and
• a stiffness compensation model of the movable object, the stiffness compensation model comprising a relation between a force exerted on the movable object and a resulting position error of the location on the movable object, the resulting position error of the location of the movable object corresponding to a difference of change in position between the location and the sensor or sensor target resulting from the exerted force on the movable object, the position control system configured to correct the position of the location using the stiffness compensation model.

A lithographic apparatus comprising:

• an illumination system configured to condition a radiation beam;
• a pattern support constructed to support a patterning device, the patterning device capable of imparting the radiation beam with a pattern in said radiation beam cross-section to form a patterned radiation beam;
• a substrate table constructed to hold a substrate;
• a projection system configured to project the patterned radiation beam onto a target portion of the substrate;
• and
• a position control system configured to control a pattern position of the patterning device, the position control system comprising
• a position measurement system configured to determine a position of a sensor or sensor target on the pattern support,
• a controller configured to provide a control signal based on a desired position of the pattern position and the determined position, and
• one or more actuators configured to act on the pattern support,
• wherein the position control system comprises a stiffness compensation model of the pattern support, the stiffness compensation model comprising a relation between a force exerted on the pattern support and a resulting position error of the pattern position, the resulting position error of the pattern position corresponding to a difference of change in position between the pattern position and the sensor or sensor target resulting from the exerted force on the pattern support, the position control system configured to substantially correct at least during imparting the radiation beam with a pattern, the position of the pattern position using the stiffness compensation model.

A method for controlling a position of a target portion of a substrate supported on a substrate support, a position of the substrate support being determined using a sensor or sensor target, the target portion to be irradiated with a patterned beam of radiation, the method comprising correcting position errors of the target portion the correcting including

• determining force signals representative of forces exerted on the substrate support and/or the substrate,
• feeding the force signals to a stiffness compensation model of the substrate support, the stiffness compensation model comprising a relation between a force exerted on the substrate support and a resulting position error of the target portion, the resulting position error of the target portion corresponding to a difference of change in position between the target portion and the sensor or sensor target resulting from the exerted forces on the substrate support;
• and
• using an output of the stiffness compensation model for correcting position errors of the target portion.

A calibration method for determining a stiffness compensation model of a substrate support in a lithographic apparatus, the substrate support configured to hold a substrate that includes a target portion, a position of the substrate support being determined using a sensor or sensor target, the stiffness compensation model comprising a relation between a force exerted on the substrate support and a resulting position error of the target portion, the method comprising:

• exerting for each of a plurality of positions of the substrate support a plurality of disturbance forces on the substrate support;
• determining a frequency response function between the disturbance forces and a resulting position error of the target portion, the resulting position error of the target portion corresponding to a difference of change in position between the target portion and the sensor or sensor target resulting from the exerted forces on the substrate support;
• and
• generating for each of the plurality of positions a compensation gain matrix, each compensation gain matrix dependent on the position of the substrate support.