Probe used for surface enhanced vibrational spectroscopic analysis and method of manufacturing the same
AssigneeCanon Kabushiki Kaisha
InventorKaoru Konakahara
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Abstract
Provided are a probe for surface enhanced vibrational spectroscopic analysis which has excellent detection sensitivity to laser light having an intensity level at which a sample is not damaged and which has a long life, and a method of manufacturing the probe. The probe for surface enhanced vibrational spectroscopic analysis is formed on a cantilever. A plurality of metal fine particles are dispersed in the probe. The plurality of metal fine particles are exposed on the surface of the probe.
Claims12
A probe for use in surface enhanced vibrational spectroscopic analysis, the probe being formed on a cantilever, the probe comprising a plurality of metal fine particles dispersed therein, the plurality of the metal fine particles being exposed on a surface of the probe.
A method of manufacturing a probe for use in surface enhanced vibrational spectroscopic analysis, comprising:
- forming a projected portion on a cantilever;
- forming a Si film including a metal fine particle layer so as to be in contact with the projected portion;
- heating the Si film including the metal fine particle layer to disperse metal fine particles in the Si film;
- and
- forming the probe by processing the Si film,
- wherein a plurality of the metal fine particles are exposed on a surface of the probe by the step of forming the probe.
Dependencies are inferred from the claim text.