# US 7,701,112 B2 · Remote center compliant flexure device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,701,112 B2 - Document ID: US7701112B2 - Status: Granted - Kind: B2 - Application number: 12/421,170 - Filed: 2009-04-09 - Published: 2009-12-03 - Granted: 2010-04-20 - Earliest claimed: 2008-10-03 - Assignees: Board of Regents, The University of Texas System - Inventors: Byung-Jin Choi; Sidigata V. Sreenivasan; Stephen C. Johnson - Web page: https://patentgrep.com/patent/US7701112B2 ## CPC - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - B29C 43/021: {characterised by the shape of the surface} - B29C 43/50: Removing moulded articles - B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic - B82Y 40/00: Manufacture or treatment of nanostructures - B29C 2043/025: {forming a microstructure, i.e. fine patterning} - B29C 2043/5007: {using cores, i.e. the cores forming part of the mould cavity} - B29C 2043/5092: {using vibrations means} - B29C 2791/008: Using vibrations during moulding - Y10T 156/1168: Gripping and pulling work apart during delaminating - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00) - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system to move about a plurality of axes. An actuation system is coupled to the flexure system to selectively constrain movement of the body along a subset of the plurality of axes. ## Claims ### Claim 1 A method for separating a template from a substrate, the template and the substrate having a template-substrate interface, comprising: generating tilting motion about a tilting axis located at the template-substrate interface; and, applying a force to increase a distance between the template and the substrate such that the template is spaced apart from the substrate. ### Claim 2 (depends on 1) The method of claim 1, wherein the tilting axis is centrally located at the template-substrate interface such that relative lateral motion between the template and the substrate is substantially insignificant during generation of the tilting motion. ### Claim 3 (depends on 1) The method of claim 1, wherein generation of the tilting motion and application of the force to increase the distance between the template and the substrate are performed concurrently. ### Claim 4 (depends on 1) The method of claim 1, wherein at least two actuators positioned on an orientation stage generate the tilting motion at the template-substrate interface, the template being positioned on a template support of the orientation stage. ### Claim 5 (depends on 4) The method of claim 4, wherein the actuators are piezo actuators. ### Claim 6 (depends on 1) The method of claim 1, wherein at least a portion of the force applied to increase the distance between the template and the substrate is provided by a Z-translation stage. ### Claim 7 (depends on 1) The method of claim 1, wherein at least a portion of the force applied to increase the distance between the template and the substrate is provided by an actuator system. ### Claim 8 A method for separating a template from a substrate, comprising: curing a liquid positioned between the template and the substrate, the cured liquid resulting in an imprinted layer; applying a first force to induce a tilting motion at an interface between the template and the substrate; and, applying a second force in a Z-direction to increase a distance between the template and the substrate. ### Claim 9 (depends on 8) The method of claim 8, wherein relative lateral motion between the template and the substrate is substantially insignificant during application of the first force. ### Claim 10 (depends on 8) The method of claim 8, wherein application of the first force induces a wedge between the template and an imprinted layer. ### Claim 11 (depends on 8) The method of claim 8, wherein application of the first force and the second force is concurrent. ### Claim 12 (depends on 8) The method of claim 8, wherein at least a portion of the second force is provided by a Z-translation stage. ### Claim 13 (depends on 8) The method of claim 8, wherein at least a portion of the second force is provided by a plurality of actuators. ### Claim 14 A method for separating a template and a transfer layer positioned on a substrate, comprising: applying a peeling force to the template by generating a tilting motion about an axis located between the template and the substrate; and, applying a pulling force to the template in the Z-direction to increase a distance between the template and the substrate. ### Claim 15 (depends on 14) The method of claim 14, wherein the axis is centrally located between the template and the substrate such that relative lateral motion between the template and the substrate is substantially insignificant during application of the peeling force. ### Claim 16 (depends on 14) The method of claim 14, wherein the peeling force and the pulling force are applied substantially simultaneously. ### Claim 17 (depends on 14) The method of claim 14, wherein at least a portion of the pulling force is provided by a Z-translation stage. ### Claim 18 (depends on 14) The method of claim 14, wherein at least a portion of the pulling force is provided by an actuator system.