Method and device for the plasma treatment of workpieces

Device for inner coating containers with a barrier layer, which has at least one plasma chamber, which can be evacuated, for holding the containers, in which the plasma chamber is located in the area of a treatment station, and in which the plasma chamber is bounded by a chamber floor, a chamber lid, and a lateral chamber wall and has at least one mounting element for positioning the container, wherein the plasma chamber (17) is disposed on a rotating plasma wheel and at least one delivery device (44) for an operating agent are arranged on a rotating support device, wherein the rotating support device is situated beneath the rotating plasma wheel, wherein the delivery device (44) is a pump configured to produce a negative pressure and connected to the treatment station, wherein the pump is at a lower height level than the plasma chamber, wherein the treatment station is also connected to a process gas supply that provides the process gas needed to produce the barrier layer.