Method and apparatus for an actuator having an intermediate frame

A method for using a microelectromechanical (MEMS) structure on a substrate, the method comprising:

• providing an intermediate frame connected with a first suspension system;
• providing the first suspension system connected with the substrate, the first suspension system comprising a first plurality of flexures connecting the intermediate frame with the substrate;
• providing an actuator body connected with a second suspension system;
• providing the second suspension system connected with the intermediate frame, the second suspension system comprising a second plurality of flexures connecting the actuator body with the intermediate frame;
• and
• actuating the MEMS structure comprising:
• elevating the intermediate frame above the substrate and rotating the intermediate frame in a first direction during elevation;
• and
• elevating the actuator body above the intermediate frame and rotating the actuator body in a second direction during elevation, the second direction being substantially opposite in direction to the first direction.