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US 7,696,843 B2Granted
MEMS filter device having a nanosize coupling element and manufacturing method thereof
AssigneePanasonic Corporation
InventorAkinori Hashimura
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Abstract
An object of the invention is to provide a coupling element of an MEMS filter with design flexibility and minimization of mass loading effects. The invention provides a structure wherein the mass loading effects are not reflected on the MEMS filter characteristic by using a nanosize coupling element with a very small mass compared to a microsize MEMS resonator, such as a carbon nanotube (CNT), as a coupling element part.
Claims9
An MEMS filter unit comprising:
- a plurality of electromechanical resonators each having a resonating body formed so as to be able to mechanically vibrate;
- and
- one or more electrodes disposed with a predetermined spacing from the resonating body for making possible electromechanical conversion,
- wherein the electromechanical resonators are jointed through a coupling element, and
- wherein the coupling element is a nanosize striped body.
2 more elements
Dependencies are inferred from the claim text.