Controller and method to mediate data collection from smart sensors for fab applications
AssigneeMKS Instruments, Inc.
InventorsUzi Lev-Ami, Guenter Sifnatsch, Mark Attwood
Life of this patent
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Abstract
The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.
Claims14
A controller-aided method of monitoring processes or equipment performance in a semiconductor manufacturing operation, the method including:
- sending from the controller to a smart sensor configuration data keyed to at least one context identifier, whereby the smart sensor is adapted to modify sensing of data responsive to receipt of a context identifier key;
- recognizing in the controller a current context of operation of a manufacturing device that is monitored by the smart sensor;
- transmitting to the smart sensor the context identifier key for the current context;
- and
- receiving from the smart sensor data sensed by the smart sensor, responsive to the context identifier key.
A controller adapted to monitoring equipment performance in a semiconductor manufacturing operation, the controller including:
- a processor;
- memory coupled to the processor;
- one or more ports coupled to the processor, adapted to communicate with smart sensors;
- and
- logic and resources operable with the processor, adapted to
- send to a smart sensor configuration data keyed to at least one context identifier, whereby the smart sensor is adapted to modify sensing of data responsive to receipt of a context identifier key;
- recognize a current context of operation of a manufacturing device that is monitored by the smart sensor;
- transmit to the smart sensor the context identifier key for the current context;
- and
- receive from the smart sensor data sensed by the smart sensor, responsive to the context identifier key.
A controller-aided method of monitoring processes or equipment performance in a semiconductor manufacturing operation, the method including:
- receiving from the controller in a smart sensor configuration data keyed to at least one context identifier;
- receiving from the controller in the smart sensor the context identifier key for the current context to which the sensing of data is to be adapted;
- and
- selecting the configuration data corresponding to the context identifier key, sensing data according to the corresponding configuration, and transmitting at least part of the sensed data to the controller.
A smart sensor adapted to monitoring manufacturing equipment performance responsive to a current context identifier key received from a controller, the smart sensor including:
- a processor;
- memory coupled to the processor;
- one or more ports coupled to the processor, adapted to communicate with at least one controller;
- and
- logic and resources operable with the processor, adapted to
- receive from the controller configuration data keyed to at least one context identifier;
- receive from the controller the context identifier key for the current context to which the controller is directing for the sensing of data to be adapted;
- and
- select the configuration data corresponding to the context identifier key, sensing data according to the corresponding configuration, and transmitting at least part of the sensed data to the controller.
Dependencies are inferred from the claim text.