Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus
AssigneeASM Japan K.K.
InventorsTakayuki Yamagishi, Tamihiro Kobayashi, Akira Watanabe, Kunihiro Kaneuchi
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Abstract
A substrate transfer apparatus for loading and unloading substrates in a reaction chamber, includes: an arm having a distal end which is laterally movable in a straight line direction; and end-effectors for loading and unloading substrates in a reaction chamber, which include a lower end-effector and an upper end-effector. One of the lower end-effector or the upper end-effector is movably coupled to the arm at a distal end of the arm, and the other end-effector is fixed to the movably coupled end-effector. The fixed end-effector is fixed to the movably coupled end-effector.
Claims15
A substrate transfer apparatus for loading and unloading substrates in a reaction chamber, comprising:
- an arm having a distal end which is laterally movable in a straight line direction;
- and
- end-effectors for loading and unloading substrates in a reaction chamber, which include a lower end-effector and an upper end-effector,
- wherein one of the lower end-effector or the upper end-effector is movably coupled to the arm at the distal end of the arm, and the other of the lower end-effector or the upper end-effector is fixed to the movably coupled end-effector,
- wherein the movably coupled end-effector has a front side, rear side, right side, and left side, and the fixed end-effector is comprised of multiple portions which are fixed to the movably coupled end-effector exclusively at the right and left sides.
A substrate transfer apparatus for loading and unloading substrates in a reaction chamber, comprising:
- an arm having a distal end which is movable for transferring substrates to or from a reaction chamber;
- and
- end-effectors for loading and unloading substrates in the reaction chamber, which include a lower end-effector and an upper end-effector,
- wherein one of the lower end-effector or the upper end-effector is coupled to the arm at the distal end of the arm, and the other of the lower end-effector or the upper end-effector is fixed to the arm-coupled end-effector,
- wherein the arm-coupled end-effector has a front side, rear side, right side, and left side, and the fixed end-effector is comprised of multiple portions which are fixed only to the arm-coupled end-effector at the right and left sides.
Dependencies are inferred from the claim text.