Real-time optimized testing of semiconductor device
AssigneeSamsung Electronics Co., Ltd.
InventorsAe-yong Chung, Hwa-cheol Lee, Se-rae Cho, Kyeong-seon Shin
Life of this patent
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Abstract
A method and system for testing a semiconductor device is disclosed. The method provides an integrated test program defined by a plurality of test items, and a test program defined by a sub-set of the test items. Test data is derived by batch sample testing of the semiconductor device, and an error rate for a test item is computed and then compared to a reference data value. On the basis of the comparison between the error rate and the reference data value, the test program may be modified in real-time.
Claims20
A method of testing a semiconductor device, comprising:
- providing an integrated test program comprising a plurality of test items;
- providing a test program defined by a sub-set of test items selected from the plurality of test items;
- deriving test data by batch sample testing of the semiconductor device;
- computing an error rate for one of the plurality of test items using the test data, and comparing the error rate to a reference data value;
- on the basis of the comparison between the error rate and the reference data value, modifying the sub-set test items defining the test program in real-time.
A test system running software implementing a testing protocol for a semiconductor device, the test system comprising:
- a server storing and executing the software to control a plurality of testers according to an automated test routine,
- each one of the plurality of testers being adapted to perform at least one electrical test on the semiconductor device, and
- the automated test routine implementing an integrated test program comprising a plurality of test items;
- wherein the software implements a method of testing the semiconductor device comprising:
- providing a plurality of test program, each uniquely defined by a respective sub-set of test items selected from the plurality of test items;
- deriving test data by batch sample testing of the semiconductor device according to the integrated test program;
- computing an error rate for one of the plurality of test items using the test data, and comparing the error rate to a reference data value;
- on the basis of the comparison between the error rate and the reference data value, modifying at least one of the plurality of test programs in real-time.
Dependencies are inferred from the claim text.