Fiber optic pressure sensor for catheter use
AssigneeOpsens Inc.
InventorsClaude Belleville, Sylvain Bussière, Richard Van Neste
Life of this patent
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AssigneeOpsens Inc.
InventorsClaude Belleville, Sylvain Bussière, Richard Van Neste
Estimating the term…
The invention provides a miniature robust fiber optic pressure sensor. The miniature fiber optic sensor comprises a Fabry-Perot chip bonded to an optical fiber. The invention provides a new sensor design that reduces the amount of adhesive required to bond the optical fiber to the Fabry-Perot sensor such that the sensor is less sensitive to moisture. The invention also provides manufacturing methods of the sensor comprising a method based on etching and a method based on using an excimer laser. The invention also provides a chip design that renders the chip less sensitive to thermal changes. The invention also provides a chip design in which a sensor diaphragm has a well-defined thickness. The invention also provides a chip design that protects the chip from etching.
A Fabry-Perot pressure chip for use as a pressure sensor when interfaced to an optical fiber, the chip comprising:
A Fabry-Perot pressure chip for use as a pressure sensor when interfaced to an optical fiber, the chip comprising:
Dependencies are inferred from the claim text.