Method and apparatus for evaluating processing apparatus status and predicting processing result

A method for predicting a processing result, comprising:

• a process of performing a predetermined first standard processing on a plurality of objects to be processed with use of a first processing apparatus set in a certain condition;
• a process of obtaining a plurality of detected data from a plurality of detectors provided at the first processing apparatus during the first standard processing;
• a process of performing a principal component analysis on the plurality of detected data obtained during the first standard processing, to construct a principal component analysis model;
• a process of obtaining residuals of the principal component analysis model as first residuals;
• a process of performing a second standard processing, which is similar to the first standard processing, on a plurality of objects to be processed, which are similar to said the plurality of objects to be processed, with use of the first processing apparatus in another condition or another second processing apparatus of the same kind;
• a process of obtaining a plurality of detected data from the plurality of detectors provided at the first processing apparatus or from a plurality of detectors provided at the second processing apparatus during the second standard processing;
• a process of applying the plurality of detected data obtained during the second standard processing to the principal component analysis model, to obtain second residuals;
• a process of selecting from the obtained second residuals those of the second residuals within a maximum and a minimum of the first residuals;
• a process of weighting the selected second residuals, and constructing a new multivariate analysis model with use of the selected second residuals;
• and
• a process of predicting a processing result of the second standard processing with use of the multivariate analysis model.