Charge control apparatus and measurement apparatus equipped with the charge control apparatus

A specimen inspection instrument, comprising:

• a specimen stage for holding an inspection specimen;
• an SEM column that irradiates a primary electron beam on the specimen held on the specimen toolslide and detects a signal resulting from generated secondary electrons;
• an SEM controller for controlling the SEM column,
• a charge control column for controlling an electrified state of the specimen;
• and
• an image formation unit that processes the signal detected by the SEM column and inspects the specimen;
• wherein:
• the SEM column is equipped with a first electron source for generating the primary electron beam,
• the charge control column is equipped with a second electron source different from the first electron source for charging the inspection specimen, and means for observing an electrified state of the specimen,
• the second electron source irradiates a second electron beam having an optical axis perpendicular to the surface of the inspection specimen;
• and
• the charge control column is rotated about an axis parallel to the optical axis of the second electron beam irradiated from the second electron source to the inspection specimen.