Method of forming a carbon nanotube structure and method of manufacturing field emission device using the method of forming a carbon nanotube structure
AssigneeSamsung SDI Co., Ltd.
InventorsHa-Jin Kim, In-Taek Han, Young-Chul Choi, Kwang-Seok Jeong
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Abstract
A method of forming a Carbon NanoTube (CNT) structure and a method of manufacturing a Field Emission Device (FED) using the method of forming a CNT structure includes: forming an electrode on a substrate, forming a buffer layer on the electrode, forming a catalyst layer in a particle shape on the buffer layer, etching the buffer layer exposed through the catalyst layer, and growing CNTs from the catalyst layer formed on the etched buffer layer.
Claims25
A method of forming a Carbon Nanolube (CNT) structure, the method comprising:
- forming an electrode on a substrate;
- forming a buffer layer on the electrode;
- forming a catalyst layer in a particle shape on the buffer layer;
- etching the buffer layer exposed through the catalyst layer;
- and
- growing CNTs from the catalyst layer formed on the etched buffer layer.
A method of manufacturing a Field Emission Device (FED), the method comprising:
- sequentially forming a cathode electrode, an insulating layer, and a gate electrode on a substrate;
- patterning the gate electrode and forming an emitter hole to expose the cathode electrode by etching the insulating layer exposed through the patterned gate electrode;
- forming a buffer layer on the cathode electrode formed in the emitter hole;
- forming a catalyst layer in a particle shape on the buffer layer;
- etching the buffer layer exposed through the catalyst layer;
- and
- growing Carbon Nanolubes (CNTs) from the catalyst layer formed on the etched buffer layer.
Dependencies are inferred from the claim text.