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US 7,682,943 B2Granted
Nanostructures and methods for manufacturing the same
AssigneeQuNano AB
InventorsLars Ivar Samuelson, Bjorn Jonas Ohlsson
Life of this patent
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Abstract
A resonant tunneling diode, and other one dimensional electronic, photonic structures, and electromechanical MEMS devices, are formed as a heterostructure in a nanowhisker by forming length segments of the whisker with different materials having different band gaps.
Claims8
A method of fabricating a semiconductor device, comprising:
- merging semiconductor nanorods in a nanorod array through coalescence into a continuous planar layer after fabrication of the nanorods;
- forming V-shaped grooves in an upper surface a substrate of a first crystalline material;
- providing a plurality of catalytic seed particles in said V-shaped grooves;
- growing the semiconductor nanorods comprising a second crystalline material from the catalytic seed particles;
- and
- the step of merging comprises continuing to grow said second crystalline material using the nanorods as growth nucleation sites, thereby to create the continuous planar layer of said second crystalline material extending over said substrate of said first crystalline material.
3 more elements
A method for forming an epitaxial layer of a second crystalline material on a substrate of a first crystalline material different from said second crystalline material, the method comprising:
- providing the substrate containing nanowhiskers of said second crystalline material;
- growing said second crystalline material, using the nanowhiskers as growth sites, whereby to create an epitaxial layer of said second crystalline material extending over said substrate;
- forming V-shaped grooves in an upper surface of said substrate of the first crystalline material;
- providing a plurality of catalytic seed particles in said V-shaped grooves;
- growing the nanowhiskers of said second crystalline material from the catalytic seed particles;
- and
- the step of growing said second crystalline material comprises continuing to grow said second crystalline material, using the nanowhiskers as growth nucleation sites.
4 more elements
Dependencies are inferred from the claim text.