US 7,682,779 B2Granted

Method for manufacturing liquid discharge head

AssigneeCanon Kabushiki Kaisha

InventorKazunari Ishizuka

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Abstract

A manufacturing method of a liquid discharge head having therein liquid discharge ports and liquid flow passageways communicated with the discharge ports, includes: providing, by depositing, on a substrate, lamination of first and second material layers containing first and second positive type photosensitive resins, respectively, first material layer containing a light absorber absorbing a light in a specific wavelength range to which first positive type photosensitive resin is photosensitive, second positive type photosensitive resin able to be photosensitive to the light in specific wavelength range; exposing second material layer to light in specific wavelength range thereby forming a pattern made of material of second material layer; exposing first material layer to light in specific wavelength range thereby forming a pattern made of first material layer; forming a coating layer covering obtained patterns formed on substrate; forming discharge ports in coating layer; and removing patterns to eventually obtain flow passageways.

Claims9

Dependent claims

A method for manufacturing a liquid discharge head provided therein with liquid discharge ports and liquid flow passageways configured to be communicated with the discharge ports, comprising, in combination, the steps of:

providing, on a substrate, a lamination of a first material layer and a second material layer arranged on the first material layer, the first material layer containing therein a first positive type photosensitive resin, the second material layer containing therein a second positive type photosensitive resin photosensitive to a light in a specific wavelength range to which the first positive type photosensitive resin is photosensitive, and further at least the first material layer containing therein a light absorber that absorbs the light in the specific wavelength range to which the first positive type photosensitive resin is photosensitive;
exposing the second material layer to the light in the specific wavelength range to which the first positive photosensitive resin is photosensitive, to define a pattern made of the material of the second material layer;
exposing the first material layer to the light in the specific wavelength range to define a pattern made of the material of the first material layer;
forming a coating layer configured to cover the patterns defined on the substrate and made of the materials of the overlaid first and second material layers;
forming the discharge ports in the coating layer;
and
removing the patterns made of the materials of the first and second material layers, to thereby obtain the flow passageways,
wherein the first material layer has a thickness thereof that is greater than that of the second material layer.

5 more elements

providing, on a substrate, a lamination of a first material layer and a second material layer arranged on the first material layer, the first material layer containing therein a first positive type photosensitive resin, the second material layer containing therein a second positive type photosensitive resin photosensitive to a light in a specific wavelength range to which the first positive type photosensitive resin is photosensitive, and further at least the first material layer containing therein a light absorber that absorbs the light in the specific wavelength range to which the first positive type photosensitive resin is photosensitive;
exposing the second material layer to the light in the specific wavelength range to which the first positive photosensitive resin is photosensitive, to define a pattern made of the material of the second material layer;
exposing the first material layer to the light in the specific wavelength range to define a pattern made of the material of the first material layer;
forming a coating layer configured to cover the patterns defined on the substrate and made of the materials of the overlaid first and second material layers;
forming the discharge ports in the coating layer;
and
removing the patterns made of the materials of the first and second material layers, to thereby obtain the flow passageways,
wherein the second material layer contains the light absorber, a ratio of containing of the light absorber in the first material layer is greater than that of the light absorber in the second material layer.

5 more elements

Dependencies are inferred from the claim text.