Back to results
US 7,682,703 B2Granted
Microfabrication using patterned topography and self-assembled monolayers
Assignee3M Innovative Properties Company
InventorsMatthew H. Frey, Khanh P. Nguyen
Life of this patent
Estimating the term…
Abstract
A method of selectively and electrolessly depositing a metal onto a substrate having a metallic microstructured surface is disclosed. The method includes forming a self-assembled monolayer on the metallic microstructured surface, exposing the self-assembled monolayer to an electroless plating solution including a soluble form of a deposit metal, and depositing electrolessly the deposit metal selectively on the metallic microstructured surface. Article formed from this method are also disclosed.
Claims10
An article comprising:
- a substrate having a substrate surface and a topographical feature comprising a protrusive and an intrusive element that is part of the substrate, said protrusive element having a height ranging from 1 nanometer to 100 micrometers above the surface disposed on the substrate surface;
- a continuous homogenous metal layer disposed on the substrate surface adjacent the topographical feature and on the topographical feature;
- a self-assembled monolayer disposed on the continuous homogenous metal layer;
- and
- a deposit metal disposed on the continuous homogenous metal layer on the topographical feature, and not disposed on the continuous homogenous metal layer substrate surface adjacent the topographical feature.
2 more elements
An article comprising:
- a substrate having a substrate surface and a topographical feature, that is part of the substrate, disposed on and extending away from the substrate surface, the topographical feature having a height ranging from 10 nanometers to 10 micrometers above the surface and having a radius of curvature of 500 nanometers or less;
- a metal layer disposed on the substrate surface adjacent the topographical feature and on the topographical feature;
- a self-assembled monolayer disposed on the metal layer;
- and
- a deposit metal disposed on the metal layer on the topographical feature, and not disposed on the metal layer substrate surface adjacent the topographical feature.
2 more elements
Dependencies are inferred from the claim text.