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US 7,682,482 B2Granted
Plasma generation apparatus and work processing apparatus
AssigneeNoritsu Koki Co., Ltd.
InventorsKazuhiro Yoshida, Ryuichi Iwasaki, Hirofumi Mankawa
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Abstract
A plasma generation apparatus is provided which includes: an apparatus main body which has a microwave generation section which generates a microwave and a plasma generation nozzle which generates and emits a plasma gas based on the energy of the microwave; a microwave detection unit which detects a microwave leaking from the apparatus main body; and a control section which stops the microwave generation section from generating a microwave if the detection unit detects a microwave.
Claims11
A plasma generation apparatus, comprising:
- an apparatus main body including:
- a microwave generation section which generates a microwaves,
- a first waveguide receiving and directing the microwaves, the first waveguide having an upper plate and a lower plate;
- a plurality of plasma generation nozzles configured to receive the microwaves and produce a plasma gas using energy of the microwaves;
- said plasma generation nozzles being attached to the lower plate of the first waveguide, each of said plasma generation nozzles including:
- a central conductor having an upper end, a lower end, a central axis, and a circumferential surface having a mid-region situated removed from and between the upper end and the power end;
- a seal member surrounding and engaging the mid-region of the circumferential surface of the central conductor;
- a seal member surrounding and engaging the mid-region of the circumferential surface of the central conductor;
- a nozzle body having a longitudinally extending central through hole which houses the central conductor therein, said nozzle body has a hollow cylindrical configuration having an upper trunk part and a lower trunk part, and a flange portion between the upper trunk part and the lower trunk part, and a connection hole defined by the upper trunk part of the nozzle body, and communicating with the through hole and extending through the nozzle body;
- a nozzle holder attached to the lower plate of the first waveguide and supporting the nozzle body and the seal member such that the central conductor is supported and extends into the central through hole of the nozzle body, and a predetermined length of the central conductor including the upper end protrudes through an aperture in the lower plate of the first wave guide and into the first waveguide, and
- said nozzle holder defining a gas supply hole and accepting said nozzle body so that said gas supply hole communicates with said connection hole such that a gas supplied to the gas supply hole is introduced into the central through hole of the nozzle body below the waveguide;
- a microwave detection unit for detecting a microwave microwaves leaking from the main body;
- and
- a control section for stopping the microwave generation section from generating if the detection unit detects a microwave.
11 more elements
A plasma generation apparatus, comprising:
- an apparatus main body including:
- a microwave generation section which generates and emits microwaves;
- a first wave guide arranged to direct the microwaves from the microwave generation section;
- a plasma generation nozzle configured to receive the microwaves and produce a plasma gas using energy of the microwaves;
- and
- said plasma generation nozzles being attached to the first waveguide;
- a microwave detection unit for detecting microwaves leaking from the main body;
- a control section for stopping the microwave generation section from generating the microwaves if the detection unit detects microwaves leaking;
- and
- a frame body forming a walled enclosure enclosing an entirety of the apparatus main body and the microwave detection unit, the flame body being formed of a material which screens out or attenuates the microwaves;
- wherein the plasma generation nozzle includes:
- a central conductor having an upper end, a lower end, a central axis, and a circumferential surface having a mid-region situated removed from and between the upper end and the rower end;
- a seal member surrounding and engaging the mid-region of the circumferential surface of the central conductor;
- a nozzle body having a longitudinally extending central through hole which houses the central conductor therein, said nozzle body has a hollow cylindrical configuration having a upper trunk part and a lower trunk part, and a flange portion between the upper trunk part and the lower trunk part, and a connection hole defined by the upper trunk part of the nozzle body, and communicating with the through hole and extending through the nozzle body;
- a nozzle holder attached to the lower plate of the first waveguide and supporting the nozzle body and the seal member such that the central conductor is supported and extends into the central through hole of the nozzle body, and a predetermined length of the central conductor including the upper end protrudes through an aperture in the lower plate of the first wave guide and into the first waveguide, and
- said nozzle holder defining a gas supply hole and accepting said nozzle body so that said gas supply hole communicates with said connection hole such that a gas supplied to the gas supply hole is introduced into the central through hole of the nozzle body below the waveguide.
13 more elements
Dependencies are inferred from the claim text.