Frontside structure damage protected megasonics clean
AssigneeApplied Materials, Inc.
InventorsZhiyong Li, Jianshe Tang, Bo Xie, Wei Lu
Life of this patent
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Abstract
An apparatus and method for removing contaminants from a workpiece is described. Embodiments of the invention describe placing a workpiece on a holding bracket within a process chamber to hold and rotate the workpiece to be cleaned. A first cleaning fluid is provided to the workpiece non-device side, while a degasified liquid is provided to the workpiece device side during megasonic cleaning. The degasified liquid inhibits cavitation from occurring on and damaging the device side of the workpiece during megasonic cleaning.
Claims15
A process for cleaning a workpiece comprising:
- placing a workpiece on a rotatable holding bracket within a process chamber, the workpiece having a device side surface and non-device side surface;
- flowing a first fluid between the workpiece non-device side surface and a top surface of a platter aligned beneath and parallel to the workpiece to form a puddle on the top surface of the platter;
- contacting a meniscus of the puddle with the workpiece non-device side surface while rotating the workpiece so that the puddle is smeared by the rotating workpiece and remains centered on the platter;
- flowing a degasified liquid from a fluid outlet located above the workpiece to the workpiece device side surface;
- and
- providing acoustic energy to the degasified liquid.
A process for cleaning a workpiece comprising:
- placing a workpiece on a rotatable holding bracket within a process chamber, the workpiece having a device side surface and non-device side surface;
- flowing a first fluid between the workpiece non-device side surface and a top surface of a platter aligned beneath and parallel to the workpiece at a first flow rate to form a puddle on the top surface of the platter;
- contacting a meniscus of the puddle with the workpiece non-device side surface while rotating the workpiece at a first RPM so that the puddle is smeared by the rotating workpiece and remains centered on the platter;
- increasing the first fluid flow to a second flow rate greater than the first flow rate after smearing the puddle;
- flowing a degasified liquid on the workpiece device side surface while flowing the first fluid flow at the second flow rate:
- increasing the workpiece rotation to a second RPM;
- and
- providing megasonic energy to the workpiece non-device side surface while rotating the workpiece at the second RPM.
Dependencies are inferred from the claim text.