Compact apparatus and method for storing and loading semiconductor wafer carriers
AssigneeApplied Materials, Inc.
InventorRobert Z. Bachrach
Life of this patent
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Abstract
An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated port for receipt of wafer carriers from an overhead factory transport, allows for local interconnection among a plurality of the inventive apparatuses, and enables independent loading of the factory load port and the tool load port. An inventive wafer handling method which divides a lot of wafers into sublots and distributes the sublots among tools configured to perform the same process is also provided.
Claims9
A method of providing wafers to a fabrication tool having a load port coupled thereto for transferring one or more wafers from a wafer carrier to the fabrication tool, comprising:
- unloading a wafer carrier from an overhead wafer carrier transport system via a transfer mechanism including a vertical transfer mechanism and a horizontal transfer mechanism;
- lowering the wafer carrier from an upper elevation position of the transfer mechanism at the overhead wafer carrier transport system with the vertical transfer mechanism;
- placing the wafer carrier at a storage location via motion of the horizontal transfer mechanism;
- lowering the wafer carrier from the storage location with the vertical transfer mechanism to the load port located at an elevation below the storage location and positioned at a lower elevation position of the vertical transfer mechanism;
- placing the wafer carrier on the load port;
- opening the wafer carrier;
- and
- extracting horizontally at least one wafer from the wafer carrier into a loadlock operatively coupled to the load port via a loader mechanism.
A system comprising:
- a fabrication tool comprising a processing chamber for performing a process on at least one wafer;
- an overhead wafer carrier transport system;
- a storage location located at an elevation below the overhead wafer carrier transport system;
- a load port located at an elevation below the storage location;
- a transfer mechanism including a vertical transfer mechanism and an horizontal transfer mechanism, the transfer mechanism extending between the overhead wafer carrier transport system positioned at an upper elevation position of the vertical transfer mechanism and the load port positioned at a lower elevation position of the vertical transfer mechanism so that the transfer mechanism is adapted to access, and transfer a wafer carrier between, the overhead wafer carrier transport system, the storage location, and the load port;
- a loadlock operatively coupled to the load port;
- and
- a loader mechanism adapted to horizontally extract at least one wafer from the wafer carrier into the loadlock.
An apparatus for supplying at least one wafer to a fabrication tool, comprising:
- a load port coupled to a fabrication tool;
- an overhead load port comprising a location to which a wafer carrier is transported via an overhead wafer carrier transport system;
- a storage location located at an elevation above the elevation of the load port and below the overhead load port coupled to the fabrication tool;
- a transfer mechanism adapted to access, and transfer a wafer carrier between, the overhead load port, the storage location, and the load port, the transfer mechanism including a vertical transfer mechanism and a horizontal transfer mechanism and wherein the overhead load port is located at an upper elevation position of the vertical transfer mechanism and above the storage location and the load port is positioned at a lower elevation position of the vertical transfer mechanism;
- a loadlock operatively coupled to the load port;
- and
- a loader mechanism adapted to horizontally extract at least one wafer from the wafer carrier into the loadlock.
Dependencies are inferred from the claim text.