Back to results
US 7,682,031 B2Granted
Catoptric objectives and systems using catoptric objectives
AssigneeCarl Zeiss SMT GmbH
InventorsHans-Jurgen Mann, David Shafer, Wilhelm Ulrich
Life of this patent
Estimating the term…
Abstract
In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.
Claims49
An objective arranged to image radiation from an object plane to an image plane, comprising:
- a plurality of elements arranged to direct the radiation from the object plane to the image plane,
- wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of 5 mm or more, the objective is a catoptric objective, and the plurality of elements includes at least one element that does not have an opening.
Dependencies are inferred from the claim text.