Deformable mirror apparatus

A deformable mirror apparatus comprising:

• a substrate;
• a plurality of electrodes provided on the substrate;
• a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, and surrounding the electrodes, and having a taper shape on the second face;
• a drive part comprising a membrane part disposed so as to cover the taper face of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part;
• and
• a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively.

A deformable mirror apparatus comprising:

• a substrate;
• a plurality of electrodes provided on the substrate;
• a spacer fixed above the substrate and surrounding the electrodes;
• a drive part comprising a membrane part disposed on the spacer so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part;
• and
• a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively,
• wherein the spacer is formed of a material which is smaller in thermal expansion coefficient than that of the membrane part in the drive part.