Self-aligned precision datums for array die placement
AssigneeXerox Corporation
InventorsPeter J. Nystrom, Peter M. Gulvin, John P. Meyers
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AssigneeXerox Corporation
InventorsPeter J. Nystrom, Peter M. Gulvin, John P. Meyers
Estimating the term…
A method and resulting device for accurately positioning an array of die modules in an imaging array, including larger partial width arrays and full page width arrays, is described herein. The method includes forming physical reference datum directly on an individual silicon die module, and positioning the individual die modules on a temporary holder. The temporary holder includes an alignment tool and singulated die are placed onto the temporary holder by abutting the physical reference datum against the alignment tool. A vacuum temporarily secures the die positioned on the temporary holder, and a permanent substrate is then attached to the die of the temporary holder. The temporary holder is released in favor of the permanent substrate having the accurately aligned die modules thereon.
An array of accurately aligned die modules in a MEMS jet printhead, the array comprising:
A singulated die module for an imaging array, the singulated die module comprising:
Dependencies are inferred from the claim text.