Multi-layer thermal insulation for a bonding system
AssigneeAsm Technology Singapore Pte Ltd
InventorsKa Shing Kenny Kwan, Man Chan
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Abstract
A thermal insulation system is provided for a component of a bonding system, such as an optical system. The thermal insulation system comprises multiple insulation layers located between the component and a heat source. The multiple insulation layers comprise at least one layer of moving air injected into the layer and a cover layer enclosing the layer of moving air. The multiple insulation layers may further comprise a layer of static air.
Claims10
A bonding system comprising:
- an optical component that is operative to observe a position on a device which is being bonded by the bonding system;
- a heat source in the bonding system;
- and
- multiple insulation layers located between the optical component and the heat source, the multiple insulation layers comprising
- a first isolating layer spaced from the optical component and defining a space between the first isolating layer and the optical component, the first isolating layer and the optical component are configured for containing a layer of static air immediately next to the optical component;
- an air inlet configured and operative to inject a continuous flow of air operative to form a layer of moving air on an opposite side of the first isolating layer from the static layer of air;
- and
- a cover layer spaced from the first isolating layer and enclosing the layer of moving air between the cover layer and the first isolating layer.
A thermal insulation system for an optical component of a bonding system that is operative to observe a position on a device which is being bonded by the bonding system, the thermal insulation system comprising:
- multiple insulation layers located between the optical component and a heat source incorporated in the bonding system, the multiple insulation layers comprising
- a first isolating layer spaced from the optical component and defining a space between the first isolating layer and the optical component, the first isolating layer and the optical component are configured for containing a layer of static air immediately next to the optical component;
- an air inlet configured and operative to inject a continuous flow of air operative to form a layer of moving air on an opposite side of the first isolating layer from the static layer of air;
- and
- a cover layer spaced from the first isolating layer and enclosing the layer of moving air between the cover layer and the first isolating layer.
Dependencies are inferred from the claim text.