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US 7,681,581 B2Granted
Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids
AssigneeFSI International, Inc.
InventorsAlan D. Rose, Darian D. Carr, James M. Eppes, Stephen G. Hanson
Life of this patent
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Abstract
Apparatuses, and related methods, for processing a workpiece that include particular baffle members or duct structures having an inlet proximal to an outer periphery of a workpiece and/or workpiece support.
Claims24
An apparatus for processing a microelectronic workpiece, comprising
- a) a support on which the workpiece is positioned during a process;
- and
- b) a plurality of moveable and nestable baffle members defining at least portions of a plurality of duct pathways having respective duct inlets proximal to an outer periphery of the workpiece,
- wherein at least one moveable and nestable baffle member comprises a hood that fits over and enshrouds an entire inlet to a downstream duet portion in a manner such that the inlet to the downstream duct can be controllably opened and choked by movement of the hood in a manner such that liquid can be separated from an exhaust stream before the exhaust stream enters the inlet to the downstream duct portion.
1 more element
An apparatus for processing a microelectronic workpiece, comprising
- a) a support on which the workpiece is positioned during a process;
- and
- b) a plurality of moveable and nestable baffle members defining at least portions of a plurality of duct pathways having respective duct inlets proximal to an outer periphery of the workpiece,
- wherein at least one portion of at least one baffle member can move relative to an inlet to a downstream duct portion in a manner so as to create a trap region where separation between a liquid material and gas material occurs.
1 more element
An apparatus for processing a microelectronic workpiece, comprising:
- a) a support on which the workpiece is positioned during a process;
- and
- b) a plurality of moveable and nestable baffle members defining at least portions of a plurality of duct pathways having respective duct inlets proximal to an outer periphery of the workpiece, wherein at least one moveable and nestable baffle member comprises a hood that enshrouds an inlet to a downstream duct portion in a manner such that the inlet to the downstream duct can be controllably opened and choked by movement of the hood in a manner such that liquid can be separated from an exhaust stream before the exhaust stream enters the inlet to the downstream duct portion, wherein the hood comprises:
- i) a cap plate that fits over the entire inlet to the downstream duct;
- ii) a first flange extending from one end of the cap plate to beyond the inlet to the downstream duct;
- and
- iii) a second flange extending from the opposite end of the cap plate as the first flange, and extending beyond the inlet to the downstream duct.
4 more elements
Dependencies are inferred from the claim text.