Micromechanical pressure sensing device
AssigneeInfineon Technologies Sensonor AS
InventorHenrik Jakobsen
Life of this patent
Estimating the term…
Abstract
A micromechanical pressure sensing device includes a silicon support structure, which is configured to provide a plurality of silicon support beams. The device further includes one or more diaphragms attached to and supported by the support beams, and at least one piezoresistive sensing device, which is buried in at least one of the support beams. The piezoresistive sensing device is arranged to sense a strain induced in the silicon support structure, the strain being induced by a fluid in contact with the one or more diaphragms, to determine the pressure acting on the one or more diaphragms.
Claims8
A micromechanical pressure sensing device, comprising:
- a silicon support structure including a plurality of silicon support beams;
- at least one diaphragm attached to and supported by the support beams;
- and
- at least one piezoresistive sensing device, buried in at least one of the support beams,
- the piezoresistive sensing device being arranged to sense a strain induced in the silicon support structure, the strain being induced by a fluid in contact with the at least one diaphragm, to determine a pressure acting on the at least one diaphragm.
Dependencies are inferred from the claim text.