Detection sensor and resonator
AssigneesNational Institute of Advanced Industrial Science and Technology, Olympus Corporation
InventorsMitsuo Konno, Tsuyoshi Ikehara, Ryutaro Maeda, Takashi Mihara
Life of this patent
Estimating the term…
Abstract
By using a disc type resonator, a sensor detects a substance having a mass and the mass with high sensitivity. Moreover, it is preferable to detect a change in vibrations of a substance attached or adsorbed to an area having a vibration amplitude equal to or larger than a constant value. This disc type resonator can be fabricated by the MEMS technique by using single-crystal or polycrystalline Si as a structural material. To improve the attachment efficiency of molecules and the like to be detected, irregularity or a groove is preferably provided on the surface of the disc type resonator.
Claims21
A detection sensor comprising:
- a disc type mechanical resonator whose vibration characteristic is changed due to attachment or adsorption of a substance having a mass;
- a driving unit that vibrates the resonator;
- and
- a detection unit that detects the substance by detecting a change in vibrations of the resonator, wherein
- the driving unit and the detection unit are spaced apart from the resonator,
- the driving unit and the detection unit detect the vibration of the resonator and a change in vibrations of the resonator by electrostatically coupling with the resonator, and the resonator vibrates only in the in-disc-face direction of the resonator.
Dependencies are inferred from the claim text.