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US 7,681,432 B2Granted
Calibrating force and displacement sensors of mechanical probes
AssigneeAgilent Technologies, Inc.
InventorsJennifer Hay, Warren Oliver
Life of this patent
Estimating the term…
Abstract
Concepts presented herein relate to a portable device that includes a frame and a fixture for engaging a mechanical probe to be calibrated. The fixture can be a platform of hard material that receives pushing action of the mechanical probe. A displacement sensor senses position of the platform with respect to the frame. An actuator is coupled to the displacement sensor and a controller is coupled to the actuator. The controller operates the actuator to cause the platform to move to a position (as indicated by the displacement sensor), while the force required to cause the displacement is measured with a force sensor.
Claims30
A device, comprising:
- a frame;
- a fixture moveable relative to the frame and including a surface adapted to engage a mechanical probe to be calibrated;
- a displacement sensor sensing a position of the fixture with respect to the frame;
- an actuator coupled to the fixture, and applying a force to the fixture;
- a controller coupled to the actuator and configured to operate the actuator to cause the fixture to move to at least two positions, and to determine the force applied to the fixture by the actuator in each of the positions.
2 more elements
A device, comprising:
- a frame;
- a fixture moveable relative to the frame and including a surface adapted to engage a mechanical probe to be calibrated;
- a displacement sensor sensing a position of the fixture with respect to the frame;
- and
- an actuator coupled to the fixture;
- a controller coupled to the actuator and configured to operate the actuator to cause the fixture to move to at least two positions;
- wherein the displacement sensor is a capacitive sensor having a pair of fixed plates and a movable plate coupled to the fixture and positioned between the fixed plates.
4 more elements
A device, comprising:
- a frame;
- a fixture moveable relative to the frame and including a surface adapted to engage a mechanical probe to be calibrated;
- a displacement sensor sensing a position of the fixture with respect to the frame;
- and
- an actuator coupled to the fixture;
- a controller coupled to the actuator and configured to operate the actuator to cause the fixture to move to at least two positions;
- wherein the controller is adapted to cause the actuator to oscillate the fixture about a target position.
4 more elements
A combination, comprising:
- a mechanical probe;
- a system controller coupled to the probe to cause actuation thereof;
- and
- a calibration device, comprising:
- a frame;
- a movable fixture;
- an actuator coupled to the fixture;
- a displacement sensor sensing a position of the fixture with respect to the frame;
- and
- a device controller coupled to the actuator and configured to operate the actuator to cause the fixture to move to at least two positions.
7 more elements
A combination, comprising:
- a mechanical probe;
- a system controller coupled to the probe to cause actuation thereof;
- and
- a calibration device, comprising:
- a frame;
- a movable fixture;
- an actuator coupled to the fixture;
- a displacement sensor sensing a position of the fixture with respect to the frame;
- and
- a device controller coupled to the actuator and configured to operate the actuator to cause the fixture to move to at least two positions;
- wherein the device controller is adapted to cause the actuator to oscillate the fixture about a target position.
8 more elements
A combination, comprising:
- a mechanical probe;
- a system controller coupled to the probe to cause actuation thereof;
- and
- a calibration device, comprising:
- a frame;
- a movable fixture;
- an actuator coupled to the fixture;
- a displacement sensor sensing a position of the fixture with respect to the frame;
- and
- a device controller coupled to the actuator and configured to operate the actuator to cause the fixture to move to at least two positions;
- wherein the displacement sensor is a capacitive sensor having a pair of fixed plates and a movable plate coupled to the fixture and positioned between the fixed plates.
8 more elements
A method, comprising:
- providing a system having a mechanical probe;
- providing a device, separate from the system, the device having a fixture for engaging the mechanical probe;
- controlling, independent of the probe position, a position of the fixture among a plurality of positions along one spatial axis;
- applying a probe force with the mechanical probe to the fixture;
- sensing the probe force and displacement of the mechanical probe along the spatial axis using the system;
- and
- sensing a fixture force along the spatial axis.
4 more elements
A method, comprising:
- providing a system having a mechanical probe;
- providing a device having a fixture for engaging the mechanical probe;
- controlling, a position of the fixture among a plurality of positions;
- applying a probe force with the mechanical probe to the fixture;
- sensing the probe force and displacement of the mechanical probe using the system;
- and
- sensing a fixture force;
- and
- further comprising:
- calibrating the system based on a comparison of the probe force and the fixture force.
7 more elements
A method, comprising:
- providing a system having a mechanical probe;
- providing a device having a fixture for engaging the mechanical probe;
- controlling, a position of the fixture among a plurality of positions;
- applying a probe force with the mechanical probe to the fixture;
- sensing the probe force and displacement of the mechanical probe using the system;
- and
- sensing a fixture force;
- and
- further comprising:
- determining stiffness of the probe based on the probe force and displacement of the probe.
7 more elements
A method, comprising:
- providing a system having a mechanical probe;
- providing a device having a fixture for engaging the mechanical probe;
- controlling, a position of the fixture among a plurality of positions;
- applying a probe force with the mechanical probe to the fixture;
- sensing the probe force and displacement of the mechanical probe using the system;
- and
- sensing a fixture force,
- wherein controlling a position further comprises:
- using a capacitive displacement sensor having a pair of fixed plates and a movable plate coupled to the fixture and positioned between the pair of fixed plates.
6 more elements
A method, comprising:
- providing a system having a mechanical probe;
- providing a device having a fixture for engaging the mechanical probe;
- controlling, a position of the fixture among a plurality of positions;
- applying a probe force with the mechanical probe to the fixture;
- sensing the probe force and displacement of the mechanical probe using the system;
- and
- sensing a fixture force;
- wherein controlling a position further comprises:
- using an electromagnetic coil coupled to a current source to apply the fixture force.
6 more elements
A method, comprising:
- providing a system having a mechanical probe;
- providing a device, separate from the system, the device having a fixture for engaging the mechanical probe;
- actuating the fixture to move through two or more positions along an axis;
- applying a force with the probe to maintain contact between the probe and the fixture;
- sensing position of the probe along the axis;
- determining the force applied between the fixture and the probe along the axis;
- and
- sensing position of the fixture along the axis.
5 more elements
A method for calibrating a system having a mechanical probe, the method comprising:
- providing a device having a fixture for engaging the mechanical probe
- actuating the fixture through two positions;
- applying a force with the probe to maintain contact between the probe and the fixture;
- sensing position of the probe;
- and
- sensing position of the fixture,
- wherein actuating the fixture comprises:
- using an electromagnetic coil coupled to a current source to apply force to the fixture.
5 more elements
A method, comprising:
- providing a system having a mechanical probe;
- providing a device having a fixture for engaging the mechanical probe
- actuating the fixture through two or more positions;
- applying a force with the probe to maintain contact between the probe and the fixture;
- sensing position of the probe;
- and
- sensing position of the fixture;
- wherein actuating the fixture comprises oscillating the fixture.
5 more elements
A method, comprising:
- providing a system having a mechanical probe;
- providing a device having a fixture for engaging the mechanical probe
- actuating the fixture through two or more positions;
- applying a force with the probe to maintain contact between the probe and the fixture;
- sensing position of the probe;
- and
- sensing position of the fixture;
- wherein sensing position of the fixture comprises:
- using a capacitive displacement sensor having a pair of fixed plates and a movable plate coupled to the fixture and positioned between the pair of fixed plates.
6 more elements
Dependencies are inferred from the claim text.