Piezoelectric resonator and method for manufacturing thereof
AssigneeEpson Toyocom Corporation
InventorKenji Tsuchido
Life of this patent
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Abstract
A piezoelectric resonator includes a resonator substrate, a base substrate supporting the resonator substrate, a lid substrate covering a surface of the resonator substrate, the surface being on an opposite side of a surface facing the base substrate, a first excitation electrode formed on the surface of the resonator substrate facing the lid substrate, a second excitation electrode formed on the surface of the resonator substrate facing the base substrate, and a third electrode provided on the surface of the resonator substrate facing the base substrate, the third electrode being electrically connected to the first excitation electrode through a concave portion which is formed on a side surface of the resonator substrate.
Claims4
A method for manufacturing a piezoelectric resonator comprising:
- preparing a resonator substrate member, a base substrate member and a lid substrate member;
- forming a plurality of resonator elements and a penetrating hole corresponding to each of the resonator elements on the resonator substrate member;
- forming a first excitation electrode on at least a part of the resonator element on one main surface of the resonator substrate member, forming a second excitation electrode on at least a part of the resonator element on the other main surface of the resonator substrate member, forming a third electrode on at least a part of the other main surface, and forming an electrode connected the first and the third electrode on at least of the internal surface of the penetrating hole;
- forming a plurality of holes each corresponding to the resonator element on the base substrate member;
- bonding the lid substrate member to the one main surface of the resonator substrate member, and bonding the base substrate member to the other main surface of the resonator substrate member such that the resonator element corresponds to the holes of the base substrate member;
- and
- cutting the lid substrate member, the resonator substrate member and the base substrate member so as to leave a part of the internal surface of the penetrating hole.
Dependencies are inferred from the claim text.