Method and apparatus for performing dummy-fill by using a set of dummy-fill cells

A computer-readable storage medium storing instructions that when executed by a computer cause the computer to perform a method for performing dummy fill in a design layout to achieve a target density that is within a narrow range of target densities, the method comprising:

• receiving a low target density and a high target density which define a narrow range of target densities;
• receiving a design layout that includes a region whose density is less than the low target density, but whose density is increasable by placing dummy shapes which require assist features and optical proximity corrections to print properly;
• receiving a set of dummy-fill cells which is used to place a dummy-fill array to fill an arbitrarily sized rectangle, and which includes assist features and optical proximity corrections to obviate the need for performing assist feature placement and optical proximity correction on the dummy fill array;
• determining a polygon in the design layout to fill with dummy-fill cells;
• fracturing the polygon into a set of rectangles;
• and
• using the set of dummy-fill cells to place a first dummy-fill array in the design layout that fills a first rectangle in the set of rectangles.

An apparatus for performing dummy fill in a design layout to achieve a target density that is within a narrow range of target densities, the apparatus comprising:

• a density receiving mechanism configured to receive a low target density and a high target density which define a narrow range of target densities;
• a layout receiving mechanism configured to receive a design layout that includes a region whose density is less than the low target density, but whose density is increasable by placing dummy shapes which require assist features and optical proximity corrections to print properly;
• a cell receiving mechanism configured to receive a set of dummy-fill cells which is used to place a dummy-fill array to fill an arbitrarily sized rectangle, and which includes assist features and optical proximity corrections to obviate the need for performing assist feature placement and optical proximity correction on the dummy fill array;
• a determining mechanism configured to determine a polygon in the design layout to fill with dummy-fill cells;
• a fracturing mechanism configured to fracture the polygon into a set of rectangles;
• and
• an array-placing mechanism configured to use the set of dummy-fill cells to place a first dummy-fill array in the design layout that fills a first rectangle in the set of rectangles.