Control device and method for a substrate processing apparatus
AssigneeTokyo Electron Limited
InventorKiyohito Iijima
Life of this patent
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Abstract
A control device controls a substrate processing apparatus including a processing chamber for processing a substrate and a plurality of units for controlling a condition in the processing chamber. The control device includes a storing device for storing a return time required for each unit to be returned from an energy saving mode to a normal mode; a management device for obtaining a return start timing for each unit to be returned from the energy saving mode to the normal mode, based on the return time of each unit stored in the storing device; and a unit controller for independently controlling each unit to be returned from the energy saving mode to the normal mode, based on the return start timing of each unit obtained by the management device.
Claims15
A control device for controlling a substrate processing apparatus including a processing chamber for processing a substrate and a plurality of units for controlling a condition in the processing chamber, comprising:
- a storing device for storing a return time required for each unit to be returned from an energy saving mode, in which an energy consumption of each unit is restrained, to a normal mode, in which the substrate is capable of being processed;
- a management device for obtaining a return start timing for each unit to be returned from the energy saving mode to the normal mode, by estimating an amount of time required for each unit to be returned from the energy saving mode to the normal mode based on the return time of each unit stored in the storing device;
- and
- a unit controller for independently controlling each unit to be returned from the energy saving mode to the normal mode, based on the return start timing of each unit obtained by the management device.
A method of controlling a control device for a substrate processing apparatus including a processing chamber for processing a substrate and a plurality of units for controlling a condition in the processing chamber, comprising the steps of:
- storing a return time in a storing device, the return time being a time required for each unit to be returned from an energy saving mode, in which an energy consumption of each unit is restrained, to a normal mode, in which the substrate is capable of being processed;
- obtaining a return start timing for each unit to be returned from the energy saving mode to the normal mode, by estimating an amount of time required for each unit to be returned from the energy saving mode to the normal mode based on the return time of each unit stored in the storing device;
- and
- controlling independently each unit to be returned from the energy saving mode to the normal mode, based on the obtained return start time of each unit.
Dependencies are inferred from the claim text.