System for processing semiconductor substrate by using laser and method of the same
AssigneeHantech Co., Ltd.
InventorsDae-Jin Kim, Je-Kil Ryu, Hyun-Jung Kim
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Abstract
The present invention provides a system for processing a semiconductor substrate using a laser beam, the system including: a storing unit storing a process control data set for a slot for loading the semiconductor substrate therein; a process controlling unit detecting identification information of the slot in which the semiconductor substrate is loaded, and reading the control data, which is set for the detected identification information, from the storing unit to control a process of the semiconductor substrate; and a substrate processing unit processing the semiconductor substrate on the basis of the read control data using the laser beam with a predetermined energy.
Claims30
A system for processing a semiconductor substrate using a laser beam, the system comprising:
- a first storing unit storing a process control data set for the semiconductor substrate;
- a second storing unit storing image data of each of processes of the semiconductor substrate;
- a photographing unit photographing the semiconductor substrate to output a photographed image of the semiconductor substrate;
- a process controlling unit comparing the outputted photographed image and the stored image data to decide the process of the semiconductor substrate, and reading the control data corresponding to the decided process from the first storing unit to control the process of the semiconductor substrate;
- and
- a substrate processing unit processing the semiconductor substrate on the basis of the read control data using the laser beam with a predetermined energy.
A method for processing a semiconductor substrate using a laser beam, the method comprising:
- setting a process control data set for the semiconductor substrate;
- storing image data of each process of the semiconductor substrate;
- photographing the semiconductor substrate to output a photographed image;
- comparing the outputted photographed image and the stored image data to decide the process of the semiconductor substrate;
- controlling the process of the semiconductor substrate on the basis of the control data corresponding to the decided process;
- and
- processing the semiconductor substrate on the basis of the control data using the laser beam with a predetermined energy.
Dependencies are inferred from the claim text.