Method for fabricating three-dimensional photonic crystal
AssigneeCanon Kabushiki Kaisha
InventorsAkinari Takagi, Hikaru Hoshi, Kiyokatsu Ikemoto, Kazuya Nobayashi
Life of this patent
Estimating the term…
Abstract
At least one exemplary embodiment is directed to a method for fabricating a three-dimensional photonic crystal. In the method for fabricating the three-dimensional photonic crystal, a plurality of layers can be defined as one unit, and the total thickness of the one unit can be controlled such that an average layer-thickness of the plurality of layers in the one unit is about equal to the ideal layer-thickness so that a photonic band-gap occurs in a desired wavelength region.
Claims7
A method for fabricating a three-dimensional photonic crystal by stacking a plurality of layers including a refractive index periodic structure, the method comprising:
- forming a laminated product by stacking layers of which number is smaller, by one, than the number of layers constituting a laminated structure of one unit
- measuring a total layer-thickness of the laminated product;
- and
- stacking a top layer of the laminated structure of the one unit on the laminated product based on a result of comparison between the total layer-thickness of the laminated product and a total layer-thickness of layers of which number is smaller, by one, than the number of layers of which total layer-thickness is calculated such that a photonic band-gap occurs in a desired wavelength region.
Dependencies are inferred from the claim text.