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US 7,680,376 B2Granted
Wafer-level alignment of optical elements
AssigneeApplied Materials, Inc.
InventorsAndreas Goebel, Gregory L. Wojcik, Lawrence C. West
Life of this patent
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Abstract
Methods are disclosed of fabricating an optical assembly. An active optical element is disposed near or on a first surface of a slab of optical material. A passive optical element is formed on a second surface of the slab, with the second surface being substantially parallel to the first surface. An optical axis of the passive optical element is aligned with an optical path between the passive optical element and an active region of the active optical element using a lithographic alignment process.
Claims16
Method of fabricating an optical assembly, the method comprising:
- disposing an active optical element near or on a first surface of a slab of optical material;
- forming a passive optical element on a second surface of the slab of optical material, wherein the second surface is substantially parallel to the first surface;
- and
- aligning an optical axis of the passive optical element with an optical path between the passive optical element and an active region of the active optical element using a lithographic alignment process that includes manufacturing alignment marks on either or both of the first surface and the second surface using a lithographic technique.
1 more element
Dependencies are inferred from the claim text.