X-ray tube and X-ray analyzing apparatus

An X-ray analyzing apparatus comprising:

• a X-ray tube comprising:
• a vacuum cabinet inside of which is brought into a vacuum state and which includes a window portion formed by an X-ray transmitting film through which an X-ray is transmitted;
• an electron beam source installed at inside of the vacuum cabinet for emitting an electron beam;
• a target for generating a primary X-ray by being irradiated with the electron beam and installed at inside of the vacuum cabinet to be able to emit the primary X-ray to an outside sample by way of the window portion;
• and
• an X-ray detecting element arranged at inside of the vacuum cabinet for detecting a fluorescent X-ray and a scattered X-ray emitted from the sample and incident from the window portion for outputting a signal including energy information of the fluorescent X-ray and the scattered X-ray;
• an analyzer for analyzing the signal;
• and
• a display portion for displaying a result of analysis of the analyzer.

An X-ray tube comprising:

• a vacuum cabinet inside of which is brought into a vacuum state and which includes a window portion formed by an X-ray transmitting film through which an X-ray is transmitted;
• an electron beam source installed at inside of the vacuum cabinet for emitting an electron beam;
• a target for generating a primary X-ray by being irradiated with the electron beam and installed at inside of the vacuum cabinet to be able to emit the primary X-ray to an outside sample by way of the window portion;
• and
• an X-ray detecting element arranged at inside of the vacuum cabinet for detecting a fluorescent X-ray and a scattered X-ray emitted from the sample and incident from the window portion for outputting a signal including energy information of the fluorescent X-ray and the scattered X-ray, wherein the X-ray detecting element comprises a transmission hole which is arranged at a region between the electron beam source and the target and through which the electron beam is transmitted.