High performance catadioptric imaging system
AssigneeKLA-Tencor Technologies Corporation
InventorsDavid R. Shafer, Yung-Ho Chuang, J. Joseph Armstrong
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AssigneeKLA-Tencor Technologies Corporation
InventorsDavid R. Shafer, Yung-Ho Chuang, J. Joseph Armstrong
Estimating the term…
A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy, at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.
A tube lens arrangement for use in inspecting a specimen, comprising:
The tube lens comprising:
The tube lens arrangement, comprising:
Dependencies are inferred from the claim text.