Method, system and apparatus of inspection
AssigneeFujitsu Microelectronics Limited
InventorsNaohiro Takahashi, Kiyoshi Irino
Life of this patent
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Abstract
A method of inspecting defects on an object includes irradiating predetermined particles with a laser beam to measure first scattered light intensities, irradiating plural types of defects with the laser beam to measure second scattered light intensities, determining types of some defects selected out of the plural types of defects using the first scattered light intensities, setting a discrimination line indicating a boundary value of the second scattered light intensities based on the determination, and discriminating, using the discrimination line, defects on the object.
Claims18
A method of inspecting defects on an object comprising:
- irradiating predetermined particles with a laser beam to measure first scattered light intensities;
- irradiating plural types of defects with the laser beam to measure second scattered light intensities;
- determining types of some defects selected out of the plural types of defects using the first scattered light intensities;
- setting, based on the determination, a discrimination line indicating a boundary value of the second scattered light intensities, the boundary value being in dependence on the types;
- and
- discriminating, using the discrimination line, defects on the object.
An inspection system of inspecting defects on an object comprising:
- a storing section storing first scattered light intensities based on predetermined particles and second scattered light intensities based on plural types of defects;
- a determining section determining types of some defects selected out of the plural types of defects using the first scattered light intensities;
- a first setting unit for setting, based on the determination, a discrimination line indicating a boundary value of the second scattered light intensities, the boundary value being in dependence on the types;
- and
- a discriminating section discriminating, using the set discrimination line, defects on the object.
An inspection apparatus used for inspecting defects on an object comprising:
- a storing section storing a first scattered light intensities based on predetermined particles and second scattered light intensities based on plural types of defects;
- an extracting section extracting some defects selected out of the plural types of defects using the second scattered light intensities;
- a determining section determining types of the some defects using the first scattered light intensities;
- a first setting section setting, using a data indicating determination results, a discrimination line indicating a boundary value of the second scattered light intensities, the boundary value being in dependence on the types;
- and
- discriminating section discriminating, using the discrimination line, defects on the object.
Dependencies are inferred from the claim text.