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US 7,679,413 B2Granted
Signal oversampling for improved S:N in reflector movement system
AssigneeMKS Instruments, Inc.
InventorsRobert M. Carangelo, Paul C. Jette, Jack Kisslinger
Life of this patent
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Abstract
Eight or more transition points are generated during a given period, and are used in tracking movement of an interferometer reflector. Duty cycles of generated square waves are used to establish precise intervals between the transition points, and precise wave-phase relationships.
Claims9
A method for tracking the position of a moving interferometer reflector, comprising the steps:
- (a) generating sinusoidally varying master and first subordinate signals from beams of radiation passed through an interferometer and upon a detector, the phase of said first subordinate signal being shifted from that of said master signal by a fraction of a cycle;
- (b) generating at least second and third subordinate sinusoidal signals from said master and first subordinate sinusoidal signals, all of said sinusoidal signals being out of phase with one another, the angular shift between each signal and the signals of closest phase relationship having a value of substantially 180° divided by the total number of said sinusoidal signals;
- (c) generating a master square-wave signal from said master sinusoidal signal such that the transition points of said master square-wave signal correspond to the zero crossing points of said master sinusoidal signal, and generating at least first, second, and third subordinate square-wave signals from said first, second and third subordinate sinusoidal signals, respectively, such that the transition points of each of said subordinate square-wave signals correspond substantially to the zero crossing points of said subordinate sinusoidal signal from which it is generated;
- (d) correcting each of said square-wave signals as necessary to impart thereto the same, selected duty cycle character;
- (e) comparing each of said subordinate square-wave signals with said master square-wave signal, each as so corrected in said step (d), and generating a square-wave signal that is indicative of the phase relationship therebetween, the indicative signal being employed to adjust dynamically the phase relationship of said each subordinate square-wave signal as necessary to conform the angular shift between it and the square-wave signals of closest phase relationship to a value of 180° divided by the total number of said square-wave signals, to thereby produce a phase relationship between said master square-wave signal and said each subordinate square-wave signal;
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- (f) utilizing the transition points of said corrected master square-wave signal and said each corrected subordinate square-wave signal, as adjusted in said step (e), to generate corresponding pulse trains indicative of the position of the interferometer reflector.
4 more elements
A method for tracking the position of a moving interferometer reflector, comprising the steps:
- (a) generating sinusoidally varying master and first subordinate signals from beams of radiation passed through an interferometer and upon a detector, the phase of said first subordinate signal being shifted from that of said master signal by a fraction of a cycle;
- (b) generating at least second and third subordinate sinusoidal signals from said master and first subordinate sinusoidal signals, all of said sinusoidal signals being out of phase with one another, the angular shift between each signal and the signals of closest phase relationship having a value of substantially 180° divided by the total number of said sinusoidal signals;
- (c) dynamically correcting the phase relationships between each said signal and said signals of closest phase relationship, as necessary to provide therebetween angular shift values of precisely 180° divided by the total number of said sinusoidal signals;
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- (d) utilizing said signals, as so corrected, to generate corresponding pulse trains indicative of the position of the interferometer reflector.
2 more elements
An apparatus for tracking the position of a moving interferometer reflector using sinusoidally varying master and first subordinate signals that are representative of the cyclically varying intensity of two beams of radiation passed through the interferometer and upon detectors to generate the signals, the phase of the first subordinate signal being shifted from that of the master signal by a fraction of a cycle, the apparatus comprising:
- (a) first generating means for generating at least second and third subordinate sinusoidal signals from the master and first subordinate sinusoidal signals, with all of the sinusoidal signals being out of phase with one another and with the angular shift between each signal and the signals of closest phase relationship having a value of substantially 180° divided by the total number of sinusoidal signals;
- (b) second generating means for generating a master square-wave signal from the master sinusoidal signal such that the transition points of the master square-wave signal correspond to the zero crossing points of the master sinusoidal signal, and for generating at least first, second, and third subordinate square-wave signals from the first, second and third subordinate sinusoidal signals, respectively, such that the transition points of each of the subordinate square-wave signals correspond substantially to the zero crossing points of the subordinate sinusoidal signal from which it is generated;
- (c) correcting means for correcting each of the square-wave signals as necessary to impart thereto the same, selected duty cycle character;
- (d) comparing and adjusting means for comparing each of the subordinate square-wave signals with the master square-wave signal, as so corrected by said correcting means, for generating a square-wave signal that is indicative of the phase relationship therebetween, and for adjusting the phase relationship of each subordinate square-wave signal as necessary to conform the angular shift between it and the square-wave signals of closest phase relationship to a value of precisely 180° divided by the total number of square-wave signals, to thereby produce a precise phase relationship between said master square-wave signal and said each subordinate square-wave signal;
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- (e) third generating means for generating pulse trains indicative of the position of the interferometer reflector, utilizing and corresponding to the transition points of the corrected master square-wave signal and of the corrected subordinate square-wave signals, as adjusted by said means for comparing.
3 more elements
Dependencies are inferred from the claim text.