Probe card for inspecting electric properties of an object
AssigneesTokyo Electron Limited, Jsr Corporation
InventorsTakashi Amemiya, Syuichi Tsukada
Life of this patent
Estimating the term…
Abstract
In the present invention, an inspection contact structure is attached to a lower surface side of a circuit board of a probe card. The inspection contact structure has a silicon substrate, and sheets attached to upper and lower surfaces of the silicon substrate. Each of the sheets is elastic and has conductive portions in a projecting shape. The silicon substrate is formed with current-carrying paths passing through the substrate in a vertical direction so that the conductive portions of the sheets and the current-carrying paths of the silicon substrate are in contact with each other. The upper and lower sheets are fixed to the silicon substrate, and the sheet on the upper surface is fixed to a circuit board.
Claims20
A probe card for inspecting electric properties of an object to be inspected located thereunder, comprising:
- a circuit board;
- and
- an inspection contact structure provided between said circuit board and the object to be inspected, for passing current between the object to be inspected and said circuit board,
- said inspection contact structure comprising:
- a substrate in a flat plate shape;
- and
- sheets attached to both upper and lower surfaces of said substrate to have the substrate sandwiched therebetween, each of said sheets composed of a plurality of elastic conductive portions and an insulating portion interconnecting said conductive portions,
- said conductive portions being formed to pass through each of said sheets and protrude from both upper and lower surfaces of each of said sheets,
- said substrate being formed with a plurality of current-carrying paths passing from the upper surface to the lower surface of said substrate,
- said conductive portions of said sheets on both surfaces of said substrate being electrically connected to corresponding current-carrying paths of said substrate,
- said sheets on both surfaces of said substrate being bonded to said substrate,
- said sheet on the upper surface side of said substrate having a frame attached thereto, and
- said frame surrounding an outer peripheral portion of said sheet on the upper surface side and holding said sheet on the upper surface side, and said sheet on the upper surface side being bonded to said circuit board by said frame;
- and
- wherein said frame is fixed to said circuit board at a position outside an outer periphery of said substrate.
A probe card for inspecting electric properties of an object to be inspected located thereunder, comprising:
- a circuit board;
- and
- an inspection contact structure provided between said circuit board and the object to be inspected, for passing current between the object to be inspected and said circuit board,
- said inspection contact structure comprising:
- a substrate in a flat plate shape;
- and
- a sheet attached to an upper surface of said substrate, said sheet composed of a plurality of elastic conductive portions and an insulating portion interconnecting said conductive portions,
- said conductive portions being formed to pass through said sheet and protrude from both upper and lower surfaces of said sheet,
- said substrate being formed with a plurality of current-carrying paths passing from the upper surface of said substrate to a lower surface of said substrate,
- said conductive portions of said sheet being electrically connected to corresponding current-carrying paths of said substrate,
- said sheet being bonded to said substrate, and
- said sheet having a frame attached thereto,
- said frame surrounding an outer peripheral portion of said sheet and holding said sheet, and said sheet being bonded to said circuit board by said frame;
- and
- wherein said frame is fixed to said circuit board at a position outside an outer periphery of said substrate.
A probe card for inspecting electric properties of an object to be inspected located thereunder, comprising:
- a circuit board;
- and
- an inspection contact structure provided between said circuit board and the object to be inspected, for passing current between the object to be inspected and said circuit board,
- said inspection contact structure comprising:
- a substrate in a flat plate shape;
- and
- sheets attached to both upper and lower surfaces of said substrate to have the substrate sandwiched therebetween, each of said sheets composed of a plurality of elastic conductive portions and an insulating portion interconnecting said conductive portions,
- said conductive portions being formed to pass through each of said sheets and protrude from both upper and lower surfaces of each of said sheets,
- said substrate being formed with a plurality of current-carrying paths passing from the upper surface of said substrate to the lower surface of said substrate,
- said conductive portions of said sheets on both surfaces of said substrate being electrically connected to corresponding current-carrying paths of said substrate,
- said sheets on both surfaces of said substrate being fixed to said substrate, and
- said sheet on the upper surface side of said substrate having a frame attached thereto,
- said frame surrounding an outer peripheral portion of said sheet and holding said sheet, and said sheet on the upper surface side being fixed to said circuit board by said frame;
- and
- wherein said frame is fixed to said circuit board at a position outside an outer periphery of said substrate,
- wherein said frame has a plurality of flexible plate shape members extending to the outside of said substrate, and
- wherein outer end portions of said plate shape members are fixed to said circuit board.
Dependencies are inferred from the claim text.