Piezolectric micro electro-mechanical system switch, array of the switches, and method of fabricating the same

The piezoelectric MEMS switch comprising:

• a semiconductor substrate including a groove;
• a support formed over the semiconductor substrate and the groove;
• an actuator formed on the support and including a piezoelectric layer;
• a switching member formed on the support on one side of the actuator, wherein upward movement of the switching member changes by a deformation of the piezoelectric layer of the actuator;
• radio frequency (RF) transfer lines arranged at a predetermined distance on the switching member and separated by a predetermined interval from each other, wherein the actuator is formed to have at least two cantilevers each having one end such that the ends are connected to each other;
• wherein the switching member comprises:
• a contact connection portion formed on the support;
• and
• contact portions formed on predetermined portions of the contact connection portion, wherein the upward movement of the contact connection portion is such that a first contact portion of the contact portions contacts one of the RF transfer lines and a second contact portion of the contact Portions contacts another of the RF transfer lines.

A piezoelectric MEMS switch comprising:

• a semiconductor substrate including a groove;
• a support formed over the semiconductor substrate and the groove;
• a switching member arranged on a predetermined portion of the support;
• first and second actuators including a piezoelectric layer and symmetrically arranged on left and right sides of the switching member;
• a cap wafer that is opposite to the semiconductor substrate at a predetermined distance;
• and
• RF transfer lines separated by a predetermined interval from each other on a surface of the cap wafer corresponding to the switching member, wherein:
• the first and second actuators each include at least two cantilevers having one end such that the ends are connected with each other, wherein the at least two cantilevers of each of the first and second actuators formed on left and right sides of the switching member are parallel and extend towards the switching member.