Semiconductor memory and fabrication method for the same
AssigneeKabushiki Kaisha Toshiba
InventorsYasuhiko Matsunaga, Fumitaka Arai, Makoto Sakuma
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AssigneeKabushiki Kaisha Toshiba
InventorsYasuhiko Matsunaga, Fumitaka Arai, Makoto Sakuma
Estimating the term…
A semiconductor memory includes a plurality of active regions; a plurality of bit line contacts disposed on respective active regions; a plurality of first local lines formed in an island shape and in contact with upper surfaces of the plurality of bit line contacts; a plurality of first via contacts in contact with the upper surfaces of the plurality of first local lines and aligned in a direction parallel to the active regions; a first bit line in contact with one of the plurality of first via contacts and extending in a direction parallel to the active regions; and a plurality of second via contacts arranged above the first via contacts that are not in contact with the first bit line through respective second local lines.
A semiconductor memory comprising:
Dependencies are inferred from the claim text.