Thin-film transistor and fabrication method thereof
AssigneeAu Optronics Corporation
InventorHan-Tu Lin
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Abstract
A fabrication method of a TFT includes successively forming four thin films containing a first conductive layer, an insulation layer, a semiconductor layer, and a second conductive layer on a substrate, performing a first PEP process to pattern the four thin films for forming a semiconductor island and a gate electrode with the semiconductor layer and the first conductive layer respectively. Then, a laser ablation process is performed to define a channel pattern in the four thin films and remove a portion of the second conductive layer so that unconnected source electrode and drain electrode are formed with the second conductive layer.
Claims6
A thin-film transistor, comprising:
- a gate electrode positioned on a substrate;
- a gate insulating layer covering the gate electrode;
- a semiconductor island positioned on the gate insulating layer;
- a source electrode and a drain electrode positioned on two sides of the semiconductor island, the source electrode and the drain electrode being not connected to each other;
- a passivation layer covering the gate electrode, the gate insulating layer, the semiconductor island, the source electrode, the drain electrode, and the substrate;
- and
- a pixel electrode covering a portion of the passivation layer and the source electrode, electrically connecting the source electrode;
- wherein the sizes of the gate insulating layer and the gate electrode are approximately the same and are larger than the size of the semiconductor island so that the gate insulating layer and the gate electrode protrude from the two sides of the semiconductor island to form a stair structure respectively, and the passivation layer step covers the surfaces of the stair structures, wherein the passivation layer directly contacts portions of the gate electrode.
Dependencies are inferred from the claim text.