Substrate structures and fabrication methods thereof
AssigneeIndustrial Technology Research Institute
InventorsLih-Hsiung Chan, Ming-Chun Hsiao, Wei-Ling Lin, Gary Wei
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Abstract
Substrate structures and fabrication methods thereof. A substrate structure includes a bendable substrate and an inorganic electrode structure on the bendable structure, wherein the inorganic electrode structure includes a conductive layer or a semiconductor layer. The inorganic electrode structure includes carbon nanotubes, carbon nanofibers, a nanolinear material, or a micro-linear material. The bendable substrate includes polyethylene (PE), polyimide (PI), polyvinyl alcohol (PVA), or polymethyl methacrylate (PMMA).
Claims2
A substrate structure, comprising:
- a bendable substrate;
- an inorganic electrode structure transferred from a transferring substrate onto the bendable substrate such that the inorganic electrode structure is indented into the bendable substrate, and a top surface of the inorganic electrode is level with a top surface of the bendable substrate;
- a plurality of auxiliary electrodes on the bendable substrate and adhered with the inorganic electrode structure;
- and
- a structural layer disposed on the inorganic electrode structure and between the auxiliary electrodes, wherein a top surface of the structural layer is coplanar with top surfaces of the auxiliary electrodes,
- wherein the inorganic electrode structure comprises a conductive layer or a semiconductor layer, and
- wherein the bendable substrate comprises polyethylene (PE), polyimide (PI), polyvinyl alcohol (PVA), or polymethyl methacrylate (PMMA).
Dependencies are inferred from the claim text.