Inductor formed in an integrated circuit
AssigneeAgere Systems Inc.
InventorsEdward Belden Harris, Sailesh Mansinh Merchant, Kurt George Steiner, Susan Clay Vitkavage
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AssigneeAgere Systems Inc.
InventorsEdward Belden Harris, Sailesh Mansinh Merchant, Kurt George Steiner, Susan Clay Vitkavage
Estimating the term…
An inductor formed within an integrated circuit and a method for forming the inductor. The inductor comprises an underlying layer of aluminum formed in a first metallization layer and patterned and etched into the desired shape. In one embodiment the aluminum line comprises a spiral shape. According to a damascene process, a conductive runner, preferably of copper, is formed in a dielectric layer overlying the aluminum line and in electrical contact therewith. The aluminum line and the conductive runner cooperate to form the inductor. In another embodiment the aluminum line and the conductive runner are formed in a vertically spaced-apart orientation, with tungsten plugs or conductive vias formed to provide electrical connection therebetween. A method for forming the inductor comprises forming an aluminum conductive line and forming a conductive runner over the conductive line.
A method for forming an inductor in a semiconductor integrated circuit, the method comprising:
Dependencies are inferred from the claim text.