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US 7,678,587 B2Granted
Cantilever-type probe and method of fabricating the same
AssigneePhicom Corporation
InventorsKi-Joon Kim, Yong-Hwi Jo
Life of this patent
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Abstract
Disclosed is a cantilever-type probe and methods of fabricating the same. The probe is comprised of a cantilever being longer lengthwise relative to the directions of width and height, and a tip extending from the bottom of the cantilever and formed at an end of the cantilever. A section of the tip parallel to the bottom of the cantilever is rectangular, having four sides slant to the lengthwise direction of the cantilever.
Claims10
A method of fabricating a probe, comprising:
- forming a mask pattern with a first opening on a substrate, the first opening exposing a predetermined region of top surface of the substrate;
- etching the substrate using the mask pattern as an etch mask to form a trench under the first opening;
- removing the mask pattern to expose a top surface of the substrate;
- forming a molding pattern with a second opening on the substrate including the trench, the second opening exposing the trench;
- forming a probe with a tip and a cantilever, the tip and the cantilever being disposed in the trench and the second opening, respectively;
- and
- removing the molding pattern and the substrate to lift off the probe,
- wherein the first opening is a hexahedral space formed at an end of the second opening, and sidewalls of the first opening slant on a lengthwise direction of the second opening.
5 more elements
Dependencies are inferred from the claim text.