Intercalated superlattice compositions and related methods for modulating dielectric property

A thin film transistor device comprising:

• a substrate;
• a dielectric material deposited on the substrate;
• and
• a semiconductor material deposited on the dielectric material;
• wherein the dielectric material comprises a multilayer composition, the multilayer composition comprising periodically alternating layers, the alternating layers comprising (a) one or more layers comprising a silyl or siloxane moiety, (b) one or more layers comprising a π-polarizable moiety, and (c) one or more layers comprising an inorganic moiety comprising one or more main group metals and/or transition metals.