System and method for depositing thin layers on non-planar substrates by stamping
AssigneesThe Regents of the University of Michigan, The Trustees of Princeton University
InventorsStephen Forrest, Xin Xu, Xiangfei Qi, Marcelo Davanco
Life of this patent
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Abstract
An elastomeric stamp is used to deposit material on a non-planar substrate. A vacuum mold is used to deform the elastomeric stamp and pressure is applied to transfer material from the stamp to the substrate. By decreasing the vacuum applied by the vacuum mold, the elasticity of the stamp may be used to apply this pressure. Pressure also may be applied by applying a force to the substrate and/or the stamp. The use of an elastomeric stamp allows for patterned layers to be deposited on a non-planar substrate with reduced chance of damage to the patterned layer.
Claims15
A method for depositing a solid material on a non-planar substrate, comprising:
- coating a surface of an elastomeric stamp with the material to be deposited;
- applying a vacuum to a vacuum mold to which the elastomeric stamp is hermetically sealed to deform the elastomeric stamp;
- placing the non-planar substrate over the coated, deformed elastomeric stamp;
- transferring the material from the elastomeric stamp to the non-planar substrate by applying a force between the coated, deformed elastomeric stamp and the non-planar substrate and after transferring the material, removing the elastomeric stamp from a deposited layer.
Dependencies are inferred from the claim text.