Method and apparatus for manufacturing fine particles

An apparatus for manufacturing fine particles comprising:

• a cylindrical reactor having a first end and a second end opposite to the first end;
• a first inlet part including at least one port introducing a reactive gas flow containing a fine particle source material along an axial direction of the reactor, the first inlet part being provided on the first end of the reactor;
• a second inlet part including at least one port introducing a diluting gas flow along the axial direction of the reactor, the second inlet part being provided on the second end of the reactor approximately counter-flow to the first inlet part;
• a plasma generator which generates plasma in a merging region where the reactive gas flow and the diluting gas flow are merged;
• a gas exhaust port provided adjacently to the merging region;
• a collector which collects fine particles contained in gas discharged from the gas exhaust port;
• a first plate including through-holes which substantially equalize a flow rate of the reactive gas flow with respect to a cross section of a flow channel, the first plate being disposed inside the reactor almost perpendicularly with respect to the axial direction of the reactor;
• and
• a second plate facing to the first plate, including though-holes which substantially equalize a flow rate of the diluting gas flow with respect to a cross section of a flow channel, the second plate being disposed inside the reactor almost perpendicularly with respect to the axial direction of the reactor.

An apparatus for manufacturing fine particles comprising:

• a cylindrical reactor having a first end and a second end opposite to the first end;
• a first inlet part including at least one port introducing a reactive gas flow containing a fine particle source material along an axial direction of the reactor, the first inlet part being provided on the first end of the reactor;
• a second inlet part including at least one port introducing a diluting gas flow along the axial direction of the reactor, the second inlet part being provided on the second end in the reactor approximately counter-flow to the first inlet part;
• a heater which heats the diluting gas flow;
• a gas exhaust port provided in a merging region where the reactive gas flow and the diluting gas flow are merged;
• a collector which collects fine particles contained in gas discharged from the gas exhaust port;
• a first plate including through-holes which substantially equalize a flow rate of the reactive gas flow with respect to a cross section of a flow channel, the first plate being disposed inside the reactor almost perpendicularly with respect to the axial direction of the reactor;
• and
• a second plate facing to the first plate, including through-holes which substantially equalize a flow rate of the diluting gas flow with respect to a cross section of a flow channel, the second plate being disposed inside the reactor almost perpendicularly with respect to the axial direction of the reactor.