Mold and molding apparatus using the same
AssigneeCanon Kabushiki Kaisha
InventorsJunichi Seki, Tohru Den
Life of this patent
Estimating the term…
Abstract
A molding apparatus for patterning a workpiece includes a mold having a pattern to be transferred to the workpiece, with the pattern including recesses, a first support member for supporting the mold, and a second support member, arranged opposite to the first support member, for supporting the workpiece. A pressing mechanism brings the first and second support members close to each other and presses the mold and the workpiece together so as to transfer, to the workpiece, the pattern on the mold. Recessed portions are provided on at least one of a surface of the mold on the first support member side, a region of the first support member, and a region of the second support member. The recessed portions correspond to recesses in the pattern of the mold.
Claims3
A method of patterning a workpiece, comprising the steps of:
- preparing a mold having a pattern comprising a first recessed portion to be transferred to the workpiece,
- setting the mold on a first support member for supporting the mold,
- placing the workpiece on a second support member arranged opposite to the first support member, and
- transferring the pattern on the mold to the workpiece by bringing the first support member and the second support member relatively close to each other,
- wherein a second recessed portion corresponding to a shape of the first recessed portion is provided in at least one of a surface of the mold on the first support member side, a region of the first support member, and a region of the second support member,
- wherein the second recessed portion is provided in the surface of the mold on the first support member side.
Dependencies are inferred from the claim text.