Device and method for joining substrates

A device for joining substrates which is used for manufacturing a chip size package formed in a way that a semiconductor substrate with plural elements formed thereon and a sealing substrate for individually sealing said elements are joined together and diced into a plurality of said chip size packages having said individual sealed element, comprising:

• a substrate supplying section for supplying said semiconductor substrate and said sealing substrate;
• a transcribing sheet supplying section for supplying an elastic transcribing sheet on which adhesive is coated;
• a transcribing sheet pressurization section for pressurizing together a joint surface of said transcribing sheet coated with said adhesive and a joint surface of said sealing substrate;
• a transcribing sheet peeling section for peeling said transcribing sheet from said sealing substrate so as to form a layer of said adhesive on said sealing substrate;
• a parallelism adjusting section for adjusting parallelism of said joint surface of said semiconductor substrate and said joint surface of said sealing substrate on which said adhesive layer is formed;
• a substrate joining section for adjusting positions of said semiconductor substrate and said sealing substrate, and then joining said semiconductor substrate and said sealing substrate which are adjusted their positions;
• and
• a substrate conveying mechanism for conveying said semiconductor substrate, said sealing substrate and said transcribing sheet among said respective sections.