Polishing apparatus, method for providing and mounting a polishing pad in a polishing apparatus, and method for producing a substrate using the polishing apparatus
AssigneeShin-Etsu Handotai Co., Ltd.
InventorYasutsugu Soeta
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Abstract
The present invention is a polishing pad used for polishing a semiconductor substrate, wherein, at least, grooves having a radial pattern are formed on a surface of the polishing pad, and so that a groove depth of the groove parts located nearer to the center than the substrate is shallower than a groove depth of the groove parts existing immediately below the substrate, and an intersection point where the grooves overlap each other at the central part of the radial pattern of the grooves does not exist immediately below the substrate. A method for processing the pad, and a method for producing a substrate using this pad are also disclosed.
Claims10
A polishing apparatus comprising at least:
- a polishing head;
- a polishing apparatus turntable on which a circular semiconductor substrate of a defined radius is mounted;
- and
- a circular polishing pad for polishing the circular semiconductor substrate, the circular polishing pad having a surface containing a plurality of V-shaped or U-shaped grooves and a center, the circular polishing pad being mounted on the polishing head so that the mounted circular semiconductor substrate is disposed outward from the center of the circular polishing pad,
- wherein the V-shaped or U-shaped grooves have a radial pattern emanating from a central part of the circular polishing pad, and the V-shaped or U-shaped grooves are formed so that a groove depth of portions of the V-shaped or U-shaped grooves located nearer to the center of the circular polishing pad than the circular substrate is shallower than a groove depth of portions of the V-shaped or U-shaped grooves existing immediately below the circular substrate, and an intersection point where the V-shaped or U-shaped grooves overlap each other at the central part of the circular polishing pad does not exist immediately below the circular substrate,
- the V-shaped or U-shaped grooves have a constant groove width at the surface and are formed so that angles between adjacent grooves are more than values obtained by mathematical formula 1 as follows:
- an angle between the V-shaped or U-shaped grooves=2×sin−1 (groove width/(2×(a distance from the center of the circular polishing pad to a center of the circular substrate−the radius of the circular substrate))), and (Mathematical formula 1)
- an average value of the total volumes of all V-shaped or U-shaped grooves in the portion of the circular polishing pad surface immediately below the circular substrate is 0.06 to 0.23 when represented by the average value of the total groove volumes in the circular polishing pad portion (mm3)/area of the circular substrate (mm2).
A method for providing and mounting a circular polishing pad in a polishing apparatus including a polishing head and a circular semiconductor substrate of a defined radius mounted on a polishing apparatus turntable, comprising:
- providing a circular polishing pad having a surface, a center, and a plurality of V-shaped or U-shaped grooves on the surface of the circular polishing pad, the V-shaped or U-shaped grooves having a radial pattern emanating from a central part of the circular polishing pad, wherein the V-shaped or U-shaped grooves have a constant groove width at the surface and are formed so that angles between adjacent grooves are more than values obtained by mathematical formula 1 as follows:
- an angle between the V-shaped or U-shaped grooves=2×sin−1 (groove width/(2×(a distance from the center of the circular polishing pad to a center of the circular substrate−the radius of the circular substrate)));
- (Mathematical formula 1)
- mounting the provided circular polishing pad on the polishing head so that the circular semiconductor substrate is disposed outward from the center of the circular polishing pad, the groove depth of portions of the V-shaped or U-shaped grooves located nearer to the center of the circular polishing pad than the circular substrate is shallower than the groove depth of portions of the V-shaped or U-shaped grooves existing immediately below the circular substrate, and an intersection point where the V-shaped or U-shaped grooves overlap each other at the central part of the circular polishing pad does not exist immediately below the circular substrate, and an average value of the total volumes of all V-shaped or U-shaped grooves in the portion of the circular polishing pad surface immediately below the circular substrate is 0.06 to 0.23 when represented by the average value of the total groove volumes in the circular polishing pad portion (mm3)/area of the circular substrate (mm2).
Dependencies are inferred from the claim text.